IBC - ION BEAM CENTER

In the Ion Beam Center (IBC), various set-ups – electrostatic accelerators, ion implanters, plasma-based ion implantation equipment, low-energy ion tools, an ion microscope etc. – are combined into a unique facility for research and applications using ion beams. Almost all ions from stable chemical nuclides are available in the ion energy range from 10 eV to about 60 MeV. In addition to broad beams, also focused (down to 1 nm) and highly-charged (charge state up to 45+) ion beams, or ions extracted from a plasma can be provided. In total, the IBC operates more than 30 dedicated tools or beamline end-stations. The specific expertise of IBC is the modification and analysis of solids by energetic ions aimed to develop novel materials for information technology, electronics or energy systems. In addition, ion beam analysis techniques became of increasing importance for interdisciplinary fields like geochemistry, climate or environmental research and resources technology. Special add-on services offered ensure a successful realization of user experiments. Based on a long-term expertise, specific equipment and common commercial procedures, the IBC is strongly active in the use of ion beam techniques for industrial applications aimed to initiate valuable product innovation

Entwicklung einer Niederenergie-Implantationskammer mit einem neuartigen Bremslinsensystem

In diesem Report wird eine Niederenergie-Implantationskammer (NEI-Kammer) beschrieben, die im Forschungszentrum Rossendorf entwickelt und aufgebaut wurde. Die Kammer ermöglicht es, die Implantation von Ionen bei niedrigen Energien (< 30 keV) mit einer Implantationsanlage für mittlere Energien durchzuführen. In der Kammer werden der Ionenstrahl, den der Implanter liefert, auf die erwünschte niedrige Energie abgebremst. Dazu wird ein elektrostatisches Bremslinsensystem eingesetzt, das auf einem neuartigen Prinzip basiert. Das System besteht aus einer Sammellinse und einer Zerstreuungslinse, wobei die Öffnungsfehler beider Linsen entgegengesetzte Vorzeichen besitzen und sich gegenseitig kompensieren. Dadurch ist es möglich, Wafer gebräuchlicher Größe bei geringer Energie mit hoher Dosishomogenität zu implantieren. Die NEI-Kammer ist insbesondere für Forschungseinrichtungen eine vorteilhafte Lösung, da sie eine wesentlich kostengünstigere und flexiblere Alternative zur Anschaffung einer Niederenergie-Implantationsanlage darstellt

Institute of Ion Beam Physics and Materials Research; Annual Report 1999

Summary of the Scientific Activities of the Institute in 1999: Highlight Reports / Short Contributions / Statistic

Institute of Ion Beam Physics and Materials Research: Annual Report 2002

Summary of the scientific activities of the institute in 2002 including selected highlight reports, short research contributions and an extended statistics overview

Annual Report 2010 - Institute of Ion Beam Physics and Materials Research

The Institute of Ion Beam Physics and Materials Research (IIM) is one of the six institutes of what was called Forschungszentrum Dresden-Rossendorf (FZD) until the end of 2010, but since this year 2011 is called “Helmholtz-Zentrum Dresden-Rossendorf (HZDR)”. This change reflects a significant transition for us: it means that the research center is now member of the Helmholtz Association of German Research Centers (HGF), i.e., a real government research laboratory, with the mission to perform research to solve fundamental societal problems. Often to date those are called the “Grand Challenges” and comprise issues such as energy supply and resources, health in relation to aging population, future mobility, or the information society. This Annual Report already bears the new corporate design, adequate for the time of its issueing, but reports results from the year 2010, when we were still member of the Leibniz Association (WGL). Our research is still mainly in the fields of semiconductor physics and materials science using ion beams. The institute operates a national and international Ion Beam Center, which, in addition to its own scientific activities, makes available fast ion technologies to universities, other research institutes, and industry. Parts of its activities are also dedicated to exploit the infrared/THz freeelectron laser at the 40 MeV superconducting electron accelerator ELBE for condensed matter research. For both facilities the institute holds EU grants for funding access of external users